Impact of Stoichiometric Silicon Nitride Growth Conditions on Dispersion and Broadband Kerr Microcombs in the Near-Visible
Abstract
We consider the impact of precursor gas ratio on nominally stoichiometric silicon nitride films, and show how it has a significant impact on microresonator integrated dispersion and broadband comb generation in the near-visible.
Publication Details
- Authors
- Publication Type
- Conference Paper
- Year of Publication
- 2021
- Date Published
- 05/2021