The Nanolithography Toolbox

Publication Details

Authors
Publication Type: Journal Article
Year of Publication: 2016
Journal: Journal of Research of the National Institute of Standards and Technology
Volume: 121
Pagination: 464
ISSN: 2165-7254
DOI: 10.6028/jres.121.024
URL: https://nvlpubs.nist.gov/nistpubs/jres/121/jres.121.024.pdf